雷射切割保護液
Laser Sawing Liquid - LSL
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雷射切割保護液

Laser Sawing Liquid - LSL
化學特性
Chemical Properties
項次 項目 內容
1. 外觀(25 ℃ 下)
Appearance (at 25 ℃)
微黃澄清液體。
Colorless to yellowish liquid
2. 酸鹼值(1%)
pH(1%)
5.0±1.0。
3. 水溶性
Water solubility
可溶於水。
Soluble。
4. 黏度
Viscosity (at 25 ℃)
LSL-20:60-70 cps。
LSL-30:220-240cps。
5. 包裝
Packaging
20L/桶
20L/Pail
6. 儲存
Storage
置於陰涼、乾燥、通風良好以及陽光無直射之地方,並存放於原包裝中。受善儲存,自生產日起,一年內皆有效果。
All products should be stored in a cool, dry, well-ventilated and without direct sunlight location, as well as stored in the original packages (eg. originally packed drum). Providing all those conditions met, the product purchased should be able to retain its full efficacies for one year, from the date of manufacture.
產品特性
Product Features

LSL 系列是專為雷射切割而開發的。
LSL Series are specially developed for laser cutting.

可以在雷射加工之前旋塗到晶圓表面,以減少碎片(加工切屑)沾附。
It is able to be spin-coated to the wafer surface before laser processing to reduce debris (machining chips) adhesion.

減少了過度加熱和燒毀異常發生,可提高了製程可靠性。
Improve reliability of the process and reduce overheating and burning.

產品具有優異的潤濕性,有助於滲透進入 pattern,並達到覆蓋均勻性。
The product has excellent wetting ability, which helps penetrate into the pattern to achieve coverage uniformity.

具有水溶性。
Good water solubility.

LSL 系列在雷射加工後可用純水去除。
LSL Series can be easily removed with pure water.

減少製程的碎屑,提升製程能力以及可靠性。
Reduce processing scrap, increase the process ability and reliability.